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          Products & Solutions

          IN-SITU WAFER TEMPERATURE WAFER

          Location: Index > Products & Solutions

          Technical Data
          Wafer Sensor Type Items Value
          TC wafer 9105 Temperature range: 00°C to 1100 °C (K type)
          0°C to 1800 °C (C or D type)
          Measurement accuracy: ±1.1°C or ±0.4% (K type)
          ±4.0°C or ±0.5% (C or D type)
          Wafer size: 2”, 4”, 6”, 8”, 12”
          No. of measurement points: 1 – 34 (standard or customized)
          RTD Wafer 9107 Temperature range: -40°C to 250 °C
          Measurement accuracy: ±0.1℃ @ 0℃
          Wafer size: 2”, 4”, 6”, 8”, 12”
          No. of measurement points: 1 – 65 (standard or customized)
          Fiber Wafer 9109 Temperature range: -40°C to 420 °C
          Measurement accuracy: ±0.5℃, @ -40~250℃
          ±1.5℃, @ 250~420℃
          Wafer size: 4”, 6”, 8”, 12”
          No. of Measurement points: Standard 1-4; or Customized
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